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Cross coupled beams mems structure allows theoretically higher coupling area for a fixed frequency than a single beam if the second flexural inplane mode of each of the coupled beams is excited through the correct configuration of the drivers. Differentiated instruction modified worksheets and tests answers. Foundations of mems, instructors solutions manual catalog. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. Practical mems, 2009, 478 pages, ville kaajakari, 0982299109.
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